Product
Semiconductor
EFEM
EFEM
- Equipped with a variety of EFEM lineups
- Mountable with 1~6 ports LPM
- Personalized configuration tailored to user needs
- FFU differential pressure sync mode available
- Compliant with SEMI standard
Features
- EFEM, a front module of equipment that processes wafers in the semiconductor manufacturing process, is responsible for tasks like wafer transporting, loading/unloading, alignment, etc. It enables efficient and stable wafer processing in the semiconductor manufacturing process.
