For 2G Glass (370X470)
Used for moving and processing glass substrates in semiconductor and display manufacturing processes. Responsible for the safe and accurate handling of glass substrates and conducts transport, loading/unloading, and alignment of glass substrates.
- Repeatability : ±0.15mm
- Clean Class : Class10 ( 0.1 ㎛ )
- Arm Type : Link Type
* Customer consultation
For 3G Glass (550X650)
Used for moving and processing glass substrates in semiconductor and display manufacturing processes. Responsible for the safe and accurate handling of glass substrates and conducts transport, loading/unloading, and alignment of glass substrates.
- Repeatability : ±0.2mm
- Clean Class: Class10 ( 0.1 ㎛ )
- Arm Type : Link Type
* Customer consultation
For 4G Glass (730X920)
Used for moving and processing glass substrates in semiconductor and display manufacturing processes. Responsible for the safe and accurate handling of glass substrates and conducts transport, loading/unloading, and alignment of glass substrates.
- Repeatability : ±0.2mm
- Clean Class: Class10 ( 0.1 ㎛ )
- Arm Type : Slide Type
* Customer consultation
For 5G Glass (1100X1250)
Used for moving and processing glass substrates in semiconductor and display manufacturing processes. Responsible for the safe and accurate handling of glass substrates and conducts transport, loading/unloading, and alignment of glass substrates.
- Repeatability : ±0.2mm
- Clean Class: Class10 ( 0.1 ㎛ )
- Arm Type : Slide Type
* Customer consultation
For 6G Glass (1500X1850)
Used for moving and processing glass substrates in semiconductor and display manufacturing processes. Responsible for the safe and accurate handling of glass substrates and conducts transport, loading/unloading, and alignment of glass substrates.
- Repeatability : ±0.2mm
- Clean Class: Class10 ( 0.1 ㎛ )
- Arm Type : Link Type
* Customer consultation
For 7G Glass (1870X2000)
Used for moving and processing glass substrates in semiconductor and display manufacturing processes. Responsible for the safe and accurate handling of glass substrates and conducts transport, loading/unloading, and alignment of glass substrates.
- Repeatability : ±0.2mm
- Clean Class: Class10 ( 0.1 ㎛ )
- Arm Type : Slide Type
* Customer consultation