ROBOSTAR

A transfer robot for transporting and loading wafers in the semiconductor manufacturing process, characterized by precise position control and high reliability/precision.
* Customization for Customer's Needs

Specification
Model	Arm Type	Object spec	Motion range	Speed	Repeatability	Payload (Kgf)	Clean Class
Vertical Type (RAW112)	Slide Arm	6", 8", 12"	T axis : 330° Z axis : 1,130mm L/R axis : ±480mm X aixs : Customer Spec	T axis : 720°/s Z axis : 2,000mm/s L/R axis : 2,000mm X aixs : 1,875mm	±0.1mm	Max. 1Kgf	Class 10
Linear Type (RAW422)	Slide Arm	6", 8", 12"	T axis : 330° Z axis : 300mm L/R axis : ±480mm X aixs : Customer Spec	T axis : 240°/s Z axis : 588mm/s L/R axis : 360°/s X aixs : 1,875mm	±0.1mm	Max. 1Kgf	Class 10
Standard Robot (RAW412)	Link Arm	6", 8", 12"	T axis : 330° Z axis : 300mm L/R axis : ±340mm X aixs : Customer Spec	T axis : 360°/s Z axis : 500mm/s L/R axis : 360°/s X aixs : 1,500mm	±0.1mm	Max. 1Kgf	Class 10
Reverse Robot (RAW461)	Link Arm	6", 8", 12"	T axis : 330° Z axis : 300mm L/R axis : ±340mm X aixs : Customer Spec	T axis : 360°/s Z axis : 500mm/s L/R axis : 180°/s X aixs : 1,875mm	±0.1mm	Max. 1Kgf	Class 10
Telescopic Robot (RAW522)	Link Arm	6", 8", 12"	T axis : 330° Z axis : 650mm L/R axis : ±340mm X aixs : Customer Spec	T axis : 360°/s Z axis : 500mm/s L/R axis : 360°/s X aixs : 1,875mm	±0.1mm	Max. 1Kgf	Class 10

Product