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Product

Pre Aligner

  • A diverse lineup of Aligner (6”, 8”, 12” Wafer, 600x600 PCB)
  • Wafer Notch / Flat Check & Centering
  • Vacuum Chuck Type
Pre Aligner

Features

  • A system for aligning wafers of semiconductor manufacturing equipment or inspection equipment. It adjusts the centering position and balance of the wafers to ensure accurate positioning and safely transports wafers to the next processing step.

Specification

Specification

Model

Object Size

Sensing

Centering repeatability

Angle repeatability

RPS-G200

150/200mm

Laser

≤ ±0.2mm

≤ ±0.2°

RPS-5200

200/300mm

Laser

≤ ±0.2mm

≤ ±0.2°

RPS-3200

300mm

Laser

≤ ±0.2mm

≤ ±0.2°

RPS-7500

600 x 600mm

Laser

≤ ±0.5mm

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