Vertical Type (RAW112)

Slide Arm

可以对应 6, 8, 12" 晶圆

T axis : 330°
Z axis : 1,130mm
L/R axis : ±480mm
X aixs : Customer Spec

T axis : 720°/s
Z axis : 2,000mm/s
L/R axis : 2,000mm
X aixs : 1,875mm

±0.1mm

Max. 1Kgf

Class 10

Linear Type (RAW422)

Slide Arm

可以对应 6, 8, 12" 晶圆

T axis : 330°
Z axis : 300mm
L/R axis : ±480mm
X aixs : Customer Spec

T axis : 240°/s
Z axis : 588mm/s
L/R axis : 360°/s
X aixs : 1,875mm

±0.1mm

Max. 1Kgf

Class 10

Standard Robot (RAW412)

Link Arm

可以对应 6, 8, 12" 晶圆

T axis : 330°
Z axis : 300mm
L/R axis : ±340mm
X aixs : Customer Spec

T axis : 360°/s
Z axis : 500mm/s
L/R axis : 360°/s
X aixs : 1,500mm

±0.1mm

Max. 1Kgf

Class 10

Reverse Robot (RAW461)

Link Arm

可以对应 6, 8, 12" 晶圆

T axis : 330°
Z axis : 300mm
L/R axis : ±340mm
X aixs : Customer Spec

T axis : 360°/s
Z axis : 500mm/s
L/R axis : 180°/s
X aixs : 1,875mm

±0.1mm

Max. 1Kgf

Class 10

Telescopic Robot (RAW522)

Link Arm

可以对应 6, 8, 12" 晶圆

T axis : 330°
Z axis : 650mm
L/R axis : ±340mm
X aixs : Customer Spec

T axis : 360°/s
Z axis : 500mm/s
L/R axis : 360°/s
X aixs : 1,875mm

±0.1mm

Max. 1Kgf

Class 10