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Product

Pre Aligner

  • 拥有多款 Line-up Aligner/对准器 (6”, 8”, 12” Wafer, 600x600 PCB)
  • 可进行 Wafer Notch / Flat Check 及 Centering
  • Vacuum Chuck Type
Pre Aligner

Features

  • Pre Aligner/校准器是半导体主工艺设备或检测设备的Wafer进行排序时使用的系统,通过调节Wafer的中心位置和平衡,来确保产品的准确位置,并将Wafer移送到下一个处理环节。

Specification

Specification

Model

Object Size

Sensing

Centering repeatability

Angle repeatability

RPS-G200

150/200mm

Laser

≤ ±0.2mm

≤ ±0.2°

RPS-5200

200/300mm

Laser

≤ ±0.2mm

≤ ±0.2°

RPS-3200

300mm

Laser

≤ ±0.2mm

≤ ±0.2°

RPS-7500

600 x 600mm

Laser

≤ ±0.5mm

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