본문바로가기

Product

Glass Transfer Robot

Glass Transfer Robot

Features

  • Used for moving and processing glass substrates in semiconductor and display manufacturing processes. Responsible for the safe and accurate handling of glass substrates and conducts transport, loading/unloading, and alignment of glass substrates.

Specification

Specification

Model

Arm Type

Object spec

Motion range (Axis)

Speed

Repeatability

Allowable Load (KGF)

Clean Class

RA2411

Link Arm

2G

T : 330°,
Z : 200mm,
L/R : ±433mm,
X : Customer Spec

T : 200°/s,
Z : 500mm/s,
L/R : 160°/s,
X : 1000mm/s

±0.15 mm

Max. 5Kgf

Class 10

RA3132

Link Arm

3G

T : 330°,
Z : 2350mm,
L/R : ±925mm,
X : Customer Spec

T : 148°/s,
Z : 1000mm/s,
L/R : 180°/s,
X : 1800mm/s

±0.2 mm

Max. 15Kgf

Class 10

RA4112

Link Arm

4G

T : 330°,
Z : 2350mm,
L/R : ±925mm,
X : Customer Spec

T : 148°/s,
Z : 1000mm/s,
L/R : 180°/s,
X : 1800mm/s

±0.2 mm

Max. 15Kgf

Class 10

RA4132

Slide Arm

4G

T : 330°,
Z : 2350mm,
L/R : ±1050mm,
X : Customer Spec

T axis : 360°/s,
Z : 1250mm/s,
L/R : 1,500mm/s,
X : 1800mm/s

±0.2 mm

Max. 15Kgf

Class 100

RA4512

Link Arm

4G

T : 330°,
Z : 2350mm,
L/R : ±700mm,
X : Customer Spec

T : 200°/s,
Z : 666mm/s,
L/R : 180°/s,
X : 1800mm/s

±0.2 mm

Max. 15Kgf

Class 10

RA4632

Slide Arm

4G

T : 330°,
Z : 1200mm,
L/R : ±580mm,
X : Customer Spec

T axis : 202°/s,
Z : 1000mm/s,
L/R : 1,500mm/s,
X : 1800mm/s

±0.2 mm

Max. 15Kgf

Class 100

RA5142

Slide Arm

5G

T : 330°,
Z : 2850mm,
L/R : ±1400mm,
X : Customer Spec

T : 360°/s,
Z : 1000mm/s,
L/R : 360°/s,
X : 2000mm/s

±0.1 mm

Max. 20Kgf

Class 100

RA5512

Link Arm

5G

T : 330°,
Z : 900mm,
L/R : ±1080mm,
X : Customer Spec

T : 225°/s,
Z : 1000mm/s,
L/R : 2000mm/s,
X : 1800mm/s

±0.2 mm

Max. 20Kgf

Class 10

RA6212

Link Arm

6G

T : 330°,
Z : 4200mm,
L/R : ±1840mm,
X : Customer Spec

T : 95°/s,
Z : 1000mm/s,
L/R : 3800mm/s,
X : 2000mm/s

±0.2 mm

Max. 25Kgf

Class 10

RA6263

Slide Arm, Rotate Hand

6G

T : 330°,
Z : 4200mm,
L/R : ±1400mm,
X : Customer Spec

T : 102°/s,
Z : 1000mm/s,
L/R : 2000mm/s,
X : 1875mm/s

±0.2 mm

Max. 25Kgf

Class 100

RA7242

Slide Arm

7G

T : 330°,
Z : 4200mm,
L/R : 2500mm,
X : Customer Spec

T : 141°/s,
Z : 1000mm/s,
L/R : 3200mm/s,
X : 2000mm/s

±0.2 mm

Max. 30Kgf

Class 100